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LPCVD

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**LPCVD**

What is LPCVD?

LPCVD stands for Low-Pressure Chemical Vapor Deposition. It's a chemical vapor deposition process carried out at significantly reduced pressures. This lower pressure helps to improve film uniformity and reduce unwanted gas-phase reactions. It is commonly used in the semiconductor industry for depositing thin films of materials like silicon nitride, polysilicon, and silicon dioxide.

Which organizations are mentioning LPCVD?

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