Energy-dispersive X-ray spectroscopy (EDS, EDX, or EDXS) is an analytical technique used for elemental analysis or chemical characterization of a sample. It relies on the interaction of an X-ray source with a sample. When a material is bombarded with X-rays, electrons are ejected from the inner shells of the atoms within the sample. The resulting electron vacancies are filled by electrons from higher energy levels, releasing energy in the form of characteristic X-rays. By measuring the energy and intensity of these emitted X-rays, the elemental composition of the sample can be determined. It is commonly used in conjunction with electron microscopy (SEM or TEM) to analyze the composition of microscopic features.
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