MEMS
What is MEMS?
MEMS (Micro-Electro-Mechanical Systems) refers to miniaturized mechanical and electro-mechanical devices and structures that are manufactured using microfabrication techniques. MEMS devices range in size from a few micrometers to millimeters and are typically made of silicon, polymers, metals, and ceramics. They integrate mechanical, electrical, optical, fluidic and chemical components. MEMS are used in a wide variety of applications, including accelerometers in smartphones and car airbags, pressure sensors in medical devices, micro-mirrors in projectors, and microfluidic devices for lab-on-a-chip systems.
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